Laser surface texturing is a potential value-added process for improving the coating adhesion through producing well-controlled surface profile patterns. This would replace currently used grit blasting texturing process that suffers from a number of issues of irregular & random pattern, difficult to control the uniformity and repeatability, sharp and jagged features, grit embedding, and so on. In this paper, a systematic investigation on laser surface texturing on stainless steel (SS304) substrates is to be reported for surface preparation of the components such as gas distribution showerhead, shutter disc, edge ring, liner, etc. used in the semiconductor processing chamber to improve the Ta coating adhesion to the textured surfaces, so as to increase the lifetime of the components.

Ultrashort pulsed laser, Surface texturing, SS304, Coating adhesion